On Approach to Analyze Nonlinear Model of Mass and Heat Transport during Gas Phase Ep- Itaxy. a Possibility to Improve Properties of Films
نویسندگان
چکیده
In this paper we introduce an analytical approach to calculate the distribution of velocity of flow of the gas mixture, the concentration distributions of the growth component and temperature fields in the zone of deposition of semiconductor layers in chemical vapor deposition using a reaction chamber with a rotating disk substrate holder. The results of analysis of the temperature and concentration fields in the reduced and atmospheric conditions (~ 0.1 atm.) pressure in the reaction chamber obtained based on the proposed theoretical models.
منابع مشابه
A modified variable physical properties model, for analyzing nanofluids flow and heat transfer over nonlinearly stretching sheet
In this paper, the problem of laminar nanofluid flow which results from the nonlinear stretching of a flat sheet is investigated numerically. In this paper, a modified variable physical properties model for analyzing nanofluids flow and heat transfer is introduced. In this model, the effective viscosity, density, and thermal conductivity of the solid-liquid mixture (nanofluids) which are common...
متن کاملMeasurement of Mass Transfer Coefficients of Natural Gas Mixture during Gas Hydrate Formation
In this study, mass transfer coefficients (MTC’s) of natural gas components during hydrate formation are reported. This work is based on the assumption that the transport of gas molecules from gas phase to aqueous phase is dominant among other resistances. Several experiments were conducted on a mixture of natural gas at different pressures and temperatures and the consumed gas was monitored an...
متن کاملStudy of MHD Second Grade Flow through a Porous Microchannel under the Dual-Phase-Lag Heat and Mass Transfer Model
A semi-analytical investigation has been carried out to analyze unsteady MHD second-grade flow under the Dual-Phase-Lag (DPL) heat and mass transfer model in a vertical microchannel filled with porous material. Diffusion thermo (Dufour) effects and homogenous chemical reaction are considered as well. The governing partial differential equations are solved by using the Laplace transform method w...
متن کاملA new approach to microstructure optimization of solid oxide fuel cell electrodes
Designing optimal microstructures for solid oxide fuel cell (SOFC) electrodes is complicated due to the multitude of electro-chemo-physical phenomena taking place simultaneously that directly affect working conditions of a SOFC electrode and its performance. In this study, a new design paradigm is presented to obtain a balance between electrochemical sites in the form of triple phase boundary (...
متن کاملInfluence of Thermal Radiation Models on Prediction of Reactive Swirling Methane/Air Flame in a Model Gas Turbine Combustor
A numerical simulation of reactive swirling methane/air non-premixed flame in a new three-dimensional model combustion chamber is carried out to assess the performance of two thermal radiation models, namely, the Discrete Transfer Radiation Model and the P-1 Model. A Finite Volume staggered grid approach is employed to solve the governing equations.The second-order upwind scheme is applied for...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 2017